Table 2 BBD parameters attained for several runs and trial ranges of PS (nm) and EE (%)
Std. | Run | X1 | X2 | X3 | X4 | X5 | PS | EE (%) | ||
|---|---|---|---|---|---|---|---|---|---|---|
Actual | Predicted | Actual | Predicted | |||||||
1 | 1 | 25 | 30 | 5 | 5 | 5 | 129.32 | 129.98 | 97.07 | 97.52 |
2 | 2 | 75 | 30 | 5 | 5 | 5 | 238.1 | 237.70 | 97.01 | 97.37 |
3 | 5 | 25 | 70 | 5 | 5 | 5 | 131.38 | 130.81 | 98.76 | 98.24 |
4 | 7 | 75 | 70 | 5 | 5 | 5 | 177.98 | 178.49 | 97.44 | 97.66 |
5 | 20 | 50 | 50 | 2.5 | 4 | 5 | 119.01 | 119.28 | 98.31 | 98.41 |
6 | 37 | 50 | 50 | 7.5 | 4 | 5 | 178.98 | 178.49 | 97.51 | 97.66 |
7 | 23 | 50 | 50 | 2.5 | 6 | 5 | 227.12 | 227.00 | 97.33 | 97.34 |
8 | 11 | 50 | 50 | 7.5 | 6 | 5 | 136.01 | 136.05 | 98.14 | 98.80 |
9 | 19 | 50 | 30 | 5 | 5 | 4 | 113.63 | 113.21 | 97.09 | 97.13 |
10 | 29 | 50 | 70 | 5 | 5 | 4 | 161.97 | 162.21 | 97.89 | 97.52 |
11 | 39 | 50 | 30 | 5 | 5 | 6 | 194.82 | 196.09 | 98.67 | 98.10 |
12 | 26 | 50 | 70 | 5 | 5 | 6 | 136.2 | 134.73 | 97.56 | 97.00 |
13 | 9 | 25 | 50 | 2.5 | 5 | 5 | 221.76 | 220.93 | 98.25 | 98.11 |
14 | 13 | 75 | 50 | 2.5 | 5 | 5 | 179.2 | 178.49 | 97.23 | 97.66 |
15 | 8 | 25 | 50 | 7.5 | 5 | 5 | 177.82 | 178.49 | 97.11 | 97.66 |
16 | 33 | 75 | 50 | 7.5 | 5 | 5 | 161.56 | 161.72 | 97.9 | 98.10 |
17 | 10 | 50 | 50 | 5 | 4 | 4 | 189.67 | 190.02 | 97.02 | 97.57 |
18 | 25 | 50 | 50 | 5 | 6 | 4 | 178.78 | 178.49 | 97.42 | 97.66 |
19 | 34 | 50 | 50 | 5 | 4 | 6 | 174.02 | 173.73 | 97.59 | 97.40 |
20 | 41 | 50 | 50 | 5 | 6 | 6 | 160.71 | 160.89 | 98.43 | 98.34 |
21 | 22 | 50 | 30 | 2.5 | 5 | 5 | 115.01 | 114.52 | 98.98 | 98.93 |
22 | 16 | 50 | 70 | 2.5 | 5 | 5 | 173.03 | 172.42 | 97.5 | 97.15 |
23 | 38 | 50 | 30 | 7.5 | 5 | 5 | 171.95 | 173.25 | 97.1 | 96.90 |
24 | 43 | 50 | 70 | 7.5 | 5 | 5 | 176.67 | 177.18 | 97.87 | 98.02 |
25 | 31 | 25 | 50 | 5 | 4 | 5 | 175.01 | 174.57 | 97.21 | 97.03 |
26 | 35 | 75 | 50 | 5 | 4 | 5 | 183.12 | 183.25 | 98.32 | 98.60 |
27 | 3 | 25 | 50 | 5 | 6 | 5 | 243.01 | 242.46 | 99.01 | 99.09 |
28 | 44 | 75 | 50 | 5 | 6 | 5 | 200.1 | 200.02 | 98.22 | 98.07 |
29 | 42 | 50 | 50 | 2.5 | 5 | 4 | 163.02 | 163.04 | 97.11 | 97.15 |
30 | 36 | 50 | 50 | 7.5 | 5 | 4 | 179 | 178.49 | 97.66 | 97.66 |
31 | 24 | 50 | 50 | 2.5 | 5 | 6 | 117.91 | 118.45 | 97.47 | 97.69 |
32 | 28 | 50 | 50 | 7.5 | 5 | 6 | 180.1 | 179.32 | 97.32 | 97.43 |
33 | 21 | 25 | 50 | 5 | 5 | 4 | 244.13 | 243.77 | 96.11 | 96.59 |
34 | 45 | 75 | 50 | 5 | 5 | 4 | 181.71 | 182.42 | 98.3 | 98.12 |
35 | 12 | 25 | 50 | 5 | 5 | 6 | 225.91 | 226.17 | 98.1 | 97.94 |
36 | 27 | 75 | 50 | 5 | 5 | 6 | 179.63 | 179.81 | 97.55 | 97.32 |
37 | 40 | 50 | 30 | 5 | 4 | 5 | 184.01 | 183.73 | 97.76 | 97.30 |
38 | 46 | 50 | 70 | 5 | 4 | 5 | 195.21 | 195.26 | 98.05 | 97.74 |
39 | 17 | 50 | 30 | 5 | 6 | 5 | 193.89 | 193.94 | 97.43 | 97.48 |
40 | 32 | 50 | 70 | 5 | 6 | 5 | 177.58 | 177.66 | 97.43 | 97.32 |
41 | 6 | 50 | 50 | 5 | 5 | 5 | 194.42 | 194.78 | 97.96 | 97.97 |
42 | 4 | 50 | 50 | 5 | 5 | 5 | 156.55 | 156.97 | 97.16 | 97.22 |
43 | 15 | 50 | 50 | 5 | 5 | 5 | 184.67 | 184.56 | 97.42 | 97.66 |
44 | 18 | 50 | 50 | 5 | 5 | 5 | 237.99 | 238.53 | 97.66 | 96.76 |
45 | 14 | 50 | 50 | 5 | 5 | 5 | 222.23 | 222.25 | 95.01 | 95.61 |
46 | 30 | 50 | 50 | 5 | 5 | 5 | 166.66 | 166.96 | 98.87 | 98.32 |